Recently, the Mueller matrix polarimeter (MMP) has been introduced for critical dimension
and overlay metrology. In practice, the measurement process invariably has errors. These …

Ellipsometry is a powerful technique for thin film structure and optical properties
determination. However the interpretation of ellipsometric data requires an additional …

A universal measurement uncertainty evaluation procedure is required for different types of
multichannel rotating-element spectroscopic ellipsometers (RE-SEs) used in modern …

We obtain the universal evaluations and expressions of measuring uncertainty for all types
of rotating-element spectroscopic ellipsometers. We introduce a general data-reduction …

We present for the first time a universal expression for the combined standard uncertainty for
all types of rotating-element spectroscopic ellipsometers (RE-SEs). Specifically, we …

The random noise and the systematic errors caused by azimuthal errors of the optical
elements, ie, the polarizer, the analyzer, or the compensator, would lead to measurement …