Light detection and ranging (LiDAR) has been widely used for airborne surveillance and
autonomous driving. The ability of robotics or even micro-robotics can be drastically …

Light detection and ranging (LiDAR) sensor is widely recognized as a critical component for
accurate perception. However, there are a host of challenges that impede their performance …

This paper presents a new omnidirectional scanning micromirror fabricated with a multi jet
fusion three-dimensional (3D) printing process. The proposed electromagnetically actuated …

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is
presented. This paper describes the structure and driving mechanism of the proposed mirror …

Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …

Piezoelectrically actuated resonant micromirrors were designed to meet the light detection
and ranging (LiDAR) system requirements. Key features were a 3-mm mirror aperture, a 40 …

Scanning mirror, as an optical vector scanning actuator, which can control the deflection and
reflection of laser beam, and plays an important role in laser scanning, laser imaging and …

Light detection and ranging (LiDAR) sensors are promising for automated transportation to
detect the surrounding environment. However, most LiDAR solutions are complex and bulky …

Electrothermally actuated MEMS mirrors are significantly lower in cost than their
electrostatically actuated counterparts, largely due to their ability to perform well without …

Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …