[PDF][PDF] A review of silicon micromachined resonant pressure sensor
W Yuan, S Ren, J Deng, D Qiao - J. Mech. Eng, 2013 - qikan.cmes.org
Silicon micromachined resonant pressure sensor is the optimum selection of pressure
monitoring in aerospace, industrial process controlling and other precision measurement …
monitoring in aerospace, industrial process controlling and other precision measurement …
[PDF][PDF] 硅微机械谐振压力传感器技术发展
苑伟政， 任森， 邓进军， 乔大勇 - 机械工程学报, 2013 - qikan.cmes.org
硅微机械谐振压力传感器是目前精度最高, 长期稳定性最好的压力传感器之一, 是航空航天,
工业过程控制和其他精密测量领域压力测试的最佳选择. 系统阐述30 年来国内外硅微机械谐振 …
工业过程控制和其他精密测量领域压力测试的最佳选择. 系统阐述30 年来国内外硅微机械谐振 …
Characterization of strongly coupled micro-resonator systems for multi-sensor applications
M Haj Hashemi - 2014 - summit.sfu.ca
The objective of this research is analyzing the behavior of strongly coupled micro-resonating
systems. In coupled resonator arrays, the additional degrees of freedom from coupling of the …
systems. In coupled resonator arrays, the additional degrees of freedom from coupling of the …
MOEMS 压力传感器的研究进展
王仕超， 张晓霞， 王祥斌， 周勇， 陈沛然， 冷洁 - 红外, 2008 - journal.sitp.ac.cn
微型光机电系统(MOEMS) 技术作为一门新兴的技术, 已广泛应用于光通信, 光显示,
数据存储和光学传感等诸多方面, 而利用这种技术制作的光学压力传感器更是具有传统压力 …
数据存储和光学传感等诸多方面, 而利用这种技术制作的光学压力传感器更是具有传统压力 …
[图书][B] Development of PZT thin-film membrane actuators
CC Lee - 2009 - search.proquest.com
Abstract Lead Zirconate Titanate Oxide (PZT) thin-film actuators have received large
attention in Microelectromechanical systems (MEMS) because they have large frequency …
attention in Microelectromechanical systems (MEMS) because they have large frequency …