Processed stacked dies

CE Uzoh, G Gao, LW Mirkarimi… - US Patent …, 2020 - Google Patents
Representative implementations of techniques and methods include processing singulated
dies in preparation for bond ing. A plurality of semiconductor die components may be …

Chemical mechanical polishing for hybrid bonding

GG Fountain Jr, C Mandalapu, CE Uzoh… - US Patent …, 2020 - Google Patents
Methods for hybrid bonding include depositing and patterning a dielectric layer on a
substrate to form openings in the dielectric layer, depositing a barrier layer over the dielectric …

Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics

G Gao, GG Fountain Jr, LW Mirkarimi, R Katkar… - US Patent …, 2021 - Google Patents
Layer structures for making direct metal-to-metal bonds at low temperatures and shorter
annealing durations in microelectronics are provided. Example bonding interface structures …

Bonded structures with integrated passive component

B Haba, I Mohammed, R Katkar, GZ Guevara… - US Patent …, 2023 - Google Patents
2018-02-20 Assigned to INVENSAS BONDING TECHNOLOGIES, INC. reassignment
INVENSAS BONDING TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST …

Large metal pads over TSV

G Gao, LEE Bongsub, GG Fountain Jr… - US Patent …, 2022 - Google Patents
Representative techniques and devices including process steps may be employed to
mitigate the potential for delamination of bonded microelectronic substrates due to metal …

Bonded structures

PM Enquist, L Wang, R Katkar, JA Delacruz… - US Patent …, 2019 - Google Patents
(57) ABSTRACT A bonded structure can include a first element having a first interface
feature and a second element having a second interface feature. The first interface feature …

Interconnect structures and methods for forming same

CE Uzoh, LW Mirkarimi - US Patent 11,195,748, 2021 - Google Patents
US11195748B2 - Interconnect structures and methods for forming same - Google Patents
US11195748B2 - Interconnect structures and methods for forming same - Google Patents …

Interface structures and methods for forming same

S Huang, B Haba, JA Delacruz - US Patent 10,784,191, 2020 - Google Patents
A stacked and electrically interconnected structure is disclosed. The structure can comprise
a first element and a second element directly bonded to the first element along a bonding …

Direct-bonded lamination for improved image clarity in optical devices

B Haba, R Katkar, I Mohammed - US Patent 11,256,004, 2022 - Google Patents
Direct-bonded lamination for improved image clarity in optical devices is provided. An
example process planarizes and plasma-activates optical surfaces to be laminated together …

Cavity packages

S Huang, JA Delacruz, L Wang, R Katkar… - US Patent …, 2021 - Google Patents
An integrated device package is disclosed. The integrated device package can include an
integrated device die, an element, a cavity, and an electrical interconnect. The ele ment can …