KS Sharma, HT Jen, SS Li, G Pillai - Journal of Micromechanics …, 2022 - iopscience.iop.org
This work reports the successful excitation of a novel bulk acoustic mode whose actuation and sensing are facilitated by the support transducer topology (STT). The design …
J Han, Y Xiao, W Chen, K Zhu… - Journal of …, 2023 - ieeexplore.ieee.org
This paper presents mechanically coupled single-crystal silicon (SCS) microelectromechanical system (MEMS) resonators for temperature coefficient of frequency …