Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop
This work investigates the performance enhancement of piezoelectric bulk mode mode-
matched gyroscopes based on a secondary phase feedback loop. An independent phase …
matched gyroscopes based on a secondary phase feedback loop. An independent phase …
Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator
This work reports the successful excitation of a novel bulk acoustic mode whose actuation
and sensing are facilitated by the support transducer topology (STT). The design …
and sensing are facilitated by the support transducer topology (STT). The design …
Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation
J Han, Y Xiao, W Chen, K Zhu… - Journal of …, 2023 - ieeexplore.ieee.org
This paper presents mechanically coupled single-crystal silicon (SCS)
microelectromechanical system (MEMS) resonators for temperature coefficient of frequency …
microelectromechanical system (MEMS) resonators for temperature coefficient of frequency …