A deep convolutional autoencoder-based approach for anomaly detection with industrial, non-images, 2-dimensional data: A semiconductor manufacturing case study

M Maggipinto, A Beghi, GA Susto - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In manufacturing industries, it is of fundamental importance to detect anomalies in
production in order to meet the required quality goals and to limit the number of defective …

Analysis and design of axial inductive displacement sensor

W Li, J Hu, Z Su, D Wang - Measurement, 2022 - Elsevier
An axial inductive displacement sensor, which can be fixed on radial direction to measure
axial displacement of the suspended rotor, is proposed in this paper. Based on Schwarz …

Helical motion wound-rotor resolver

F Zare, Z Nasiri-Gheidari - IEEE Sensors Journal, 2022 - ieeexplore.ieee.org
In this paper an integrated core, high reliability, linear-rotational resolver with a simple
slotless configuration is proposed. The moving part of the proposed resolver has only one …

An absolute linear displacement sensor based on orthogonal dual traveling wave magnetic field

L Wu, P Tong, X Wang, R Su - IEEE Sensors Journal, 2022 - ieeexplore.ieee.org
This paper presents an absolute linear displacement sensor, which is based on orthogonal
dual traveling wave magnetic field. The sensor consists of two groups of field coils and …

A novel eddy current sensor for displacement measurement with high accuracy and long range

P Tong, L Wu, A Yanchen, R Su, Y Wu - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
To enlarge the measurement range of traditional eddy current displacement sensors, a
novel eddy current linear sensor for displacement measurement with high accuracy and …

An inductive sensor for the angular displacement measurement of large and hollow rotary machinery

L Wu, R Su, P Tong, A Yanchen, Y Wu - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
This article presents an inductive sensor for angle measurement of the large and hollow
rotary machinery. The sensor consists of the magnetic core, primary coils, and secondary …

An inductive sensor for two-dimensional displacement measurement

L Wu, S Xu, Z Zhong, C Mou, X Wang - Sensors, 2020 - mdpi.com
The simultaneous and independent measurements of two-dimensional (2D) displacements
are significant for 2D positioning. Here a planar inductive sensor which is based on the …

A New 2D displacement measurement method based on an eddy current sensor and absolute encoding

K Ma, Q Yang, J Zhang, X Dang, P Hu - Machines, 2022 - mdpi.com
A new method of two-dimensional (2D) plane displacement measurement based on an eddy
current sensor is proposed in this paper. A series of grooves with different widths and depths …

Magnetoresistive micro-displacement sensor based on magnetorheological fluid

X Li, J Zhang, L Shen, L Qin, Q Fu… - Smart Materials and …, 2021 - iopscience.iop.org
A novel magnetoresistance material based on magnetorheological fluid (MRF) was
developed for applications in micro-displacement sensor. The MRF samples were fabricated …

[PDF][PDF] 基于平面驻波磁场的二维位移传感器测量原理与结构优化

武亮, 王鑫达, 童鹏, 徐是 - 仪器仪表学报, 2021 - yqyb.cnjournals.com
在芯片制造, 智能制造, 航空航天等领域, 精密平面定位迫切需要平面两维度位移的同步独立精密
测量. 本文提出一种基于电磁感应原理的平面位移传感器, 由动阵面和定阵面组成. 定阵面由m× …