[HTML][HTML] Indepth doping assessment of thick doped GaAs layer by scanning spreading resistance microscopy

L Qiang, E Chereau, P Regreny, G Avit… - Journal of Applied …, 2024 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) measurements were performed on
GaAs thick films grown by hydride vapor phase epitaxy technology under different growth …

Two‐dimensional profiling of carriers in terahertz quantum cascade lasers using calibrated scanning spreading resistance microscopy and scanning capacitance …

RS Dhar, D Ban - Journal of Microscopy, 2013 - Wiley Online Library
The distribution of charge carriers inside the active region of a terahertz (THz) quantum
cascade laser (QCL) has been measured with scanning spreading resistance microscopy …

Carrier profiling with fast Fourier transform scanning spreading resistance microscopy: A case study for Ge, GaAs, InGaAs, and InP

O Dixon-Luinenburg, U Celano, W Vandervorst… - Ultramicroscopy, 2019 - Elsevier
Quantitative scanning spreading resistance microscopy is currently a powerful method for
carrier profiling in scaled nanoelectronic devices. Faced with the further reduction of …

[PDF][PDF] Fundamental Study of Photomodulated Optical Reflectance towards Non-Destructive Carrier Profiling in Silicon

J Bogdanowicz - 2011 - lirias.kuleuven.be
One of the many crucial issues in fabricating state-of-the-art Complementary Metal Oxide
Semiconductor transistors is the precise electrical characterization of Ultra-Shallow …

[PDF][PDF] Диагностика полупроводниковых структур методом электрохимического вольт-фарадного профилирования

ДС Фролов - 2016 - forum.eltech.ru
Актуальность темы. Разработка и создание новых материалов и структур для
полупроводниковой электроники требует соответствующего развития средств …

Nanometer Probing of Operating Nano-Photonic Devices

RS Dhar - 2014 - uwspace.uwaterloo.ca
The external performance of quantum optoelectronic devices is governed by the three-
dimensional profiles of electric potentials determined by the distribution of charge carriers …

SSRM and SCM study for doping concentration of THZ QCL devices

RS Dhar, D Ban - Photonics North 2012, 2012 - spiedigitallibrary.org
Two-dimensional (2D) dopant profiling of the active region of THz quantum cascade laser
(QCL) devices has been achieved with atomic force microscopy (AFM). Scanning spreading …