Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

This article introduces a double-sided vibrating MOEMS gyroscope which uses a readout
circuit with a novel technique based on an asymmetric Au grating. The proposed asymmetric …

In this article, a two-dimensional (2-D) tunable photonic crystal wavelength-modulated micro-
opto-electro-mechanical system (MOEMS) gyroscope is reported. The device consists of a …

An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS)
accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the …

In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input …

In this paper, we present the design, fabrication, and test of a micro-opto-electro-mechanical
systems (MOEMS) accelerometer based on the Talbot effect of double-layer diffraction …

提出了一种基于微纳光栅泰伯效应的微光机电系统(MOEMS) 加速度计, 通过Comsol
软件对加速度计结构和光栅结构参数进行优化, 使其在20g 量程范围内获得较大的结构灵敏度和 …

We propose a high-precision micro-displacement measurement method based on
alternately oscillating optoelectronic oscillators (OEOs). This method uses a reference loop …

In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry Perot cavities consisting of Bragg mirrors. Input …