Using block copolymers as infiltration sites for development of future nanoelectronic devices: Achievements, barriers, and opportunities

C Cummins, MA Morris - Microelectronic Engineering, 2018 - Elsevier
Creating inorganic nanostructures for development of nanoelectronic device components is
a highly active research area. The ability for manipulation of the chemistry of materials, as …

Structure-based design of dual bactericidal and bacteria-releasing nanosurfaces

D Salatto, Z Huang, PT Benziger… - … Applied Materials & …, 2023 - ACS Publications
Here, we report synergistic nanostructured surfaces combining bactericidal and bacteria-
releasing properties. A polystyrene-block-poly (methyl methacrylate)(PS-block-PMMA) …

Block Copolymer Derived Porous Carbon Fiber: An Emerging Structural Functional Material

G Liu - Macromolecules, 2023 - ACS Publications
Since their inception over 60 years ago, block copolymers have ripened to a state that has
extraordinary impacts on chemistry, physics, biology, materials science, and engineering …

Dry-etching processes for high-aspect-ratio features with sub-10 nm resolution high-χ block copolymers

G Pound-Lana, P Bézard, C Petit-Etienne… - … Applied Materials & …, 2021 - ACS Publications
Directed self-assembly of block copolymers (BCP) is a very attractive technique for the
realization of functional nanostructures at high resolution. In this work, we developed full dry …

[HTML][HTML] Dissipative particle dynamics for directed self-assembly of block copolymers

H Huang, A Alexander-Katz - The Journal of chemical physics, 2019 - pubs.aip.org
The dissipative particle dynamics (DPD) simulation method has been shown to be a
promising tool to study self-assembly of soft matter systems. In particular, it has been used to …

Etched ion tracks in amorphous SiO2 characterized by small angle x-ray scattering: Influence of ion energy and etching conditions

A Hadley, C Notthoff, P Mota-Santiago… - …, 2019 - iopscience.iop.org
Small angle x-ray scattering was used to study the morphology of conical structures formed
in thin films of amorphous SiO 2. Samples were irradiated with 1.1 GeV Au ions at the GSI …

High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐b‐PMMA Block Copolymer Nanomasks during Mask Development

J Bürger, H Venugopal, D Kool… - Advanced Materials …, 2022 - Wiley Online Library
Nanolithography with self‐assembled block copolymers (BCPs) is an emerging competitive
alternative to conventional lithography, which is currently reaching its limits with regard to …

Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application

MGG Cacho, P Pimenta-Barros, M Argoud… - Microelectronic …, 2020 - Elsevier
Abstract Directed Self-Assembly of block copolymers is a lithographic technique being
developed to reach sub-10 nm technological nodes. Recently, high chi block copolymers …

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

MG Gusmão Cacho, K Benotmane… - Journal of Vacuum …, 2021 - pubs.aip.org
Directed self-assembly (DSA) of block copolymers (BCPs) is an advanced patterning
technique being investigated to obtain small and dense patterns for future technological …

PMMA removal selectivity to polystyrene using dry etch approach

A Sarrazin, N Posseme, P Pimenta-Barros… - Journal of Vacuum …, 2016 - pubs.aip.org
For sub-10 nm technologies, the semiconductor industry is facing the limits of conventional
lithography to achieve narrow dimensions. Directed self-assembly (DSA) of block …