For automated manufacturing systems (AMSs), deadlock resolution in terms of Petri nets
remains an attractive topic to which many approaches are dedicated. However, few of them …

In a distributed robotic system, both human-controlled (semi-autonomous) and computer-
controlled (fully autonomous) robots may simultaneously exist. From the global system's …

This paper addresses the scheduling problem of single-arm cluster tools with both wafer
residency time constraints and activity time variation in semiconductor manufacturing. Based …

Scheduling modeling for manufacturing system has always been a great challenge in both
industrial and academic community. With the growing complexity of the manufacturing …

In this paper, a colored timed resource‐oriented Petri net (CTROPN) is developed to model
the cluster tools in semiconductor fabrication. It is structurally simple and concise, since each …

In semiconductor manufacturing, wafer residency time constraints make the scheduling
problem of cluster tools complicated. A process module (PM) in cluster tools is prone to …

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …

For a class of Petri nets whose uncontrollable influence subnets are forward synchronization
and backward conflict-free nets, this paper proposes an algorithm to transform a given …

For practical automated manufacturing systems (AMSs), the time dimension is of great
significance and should be integrated in their plant models. Reasonably, many of the …

This paper focuses on the liveness analysis and deadlock control for automated
manufacturing systems (AMSs) with multiple resource requirements. Such an AMS is …