K Ishiji,
A Yoneyama, M Inaba, K Fukuda… - Japanese Journal of …, 2024 - iopscience.iop.org
We used 3D micro-X-ray topography (3D μ-XRT) to construct a 3D structure of the threading
screw dislocations (TSDs) in 4H-SiC. The 00012 diffraction condition, which can observe the …