Periodic Surface Structures by Laser Interference Ablation

J Ihlemann, A Blumenstein, JH Klein-Wiele… - … : The Pursuit of Extreme …, 2023 - Springer
Interference of two or more overlapping coherent laser beams leads to a spatially periodic
intensity modulation. Placing a material surface at this position and applying a sufficiently …

Nanofabrication of solid materials with ultraviolet femtosecond pulses

JH Klein-Wiele, J Bekesi, J Ihlemann… - Laser-Assisted Micro …, 2004 - spiedigitallibrary.org
Surface treatment of metals and other materials is studied using sub-picosecond laser
pulses at 248 nm. The advantage of the combination of femtosecond pulse durations with …

Optics and Apparatus for Excimer Laser/EUV Microprocessing

J Ihlemann, T Makimura - Handbook of Laser Micro-and Nano …, 2021 - Springer
The optics and processing apparatus for excimer laser microprocessing generally consists
of a beam shaping optics (homogenizer) and mask projection optics. The function of …

Optimal pulse duration for femtosecond laser ablation

Y Prior, K Zhang, V Batenkov… - High-Power Laser …, 2004 - spiedigitallibrary.org
Femtosecond laser ablation occurs on timescales faster than the thermalization of the
excited electrons and the lattice in solid materials. The ultrafast deposition of energy …

Ultraviolet laser ablation of polymers and the role of liquid formation and expulsion

S Lazare, V Tokarev - Recent Advances in Laser Processing of …, 2005 - books.google.com
Excimer laser ablation of common polymers is introduced and multipulse high aspect (up to
600) ratio microdrilling (diam. 25 μm) is explained. Mechanisms of material removal include …

Via drilling

M Hessling, J Ihlemann - Excimer Laser Technology, 2005 - Springer
Six years after the first commercial excimer lasers had found their way into research
laboratories, in 1982 Srinivasan and co-workers reported their discovery of the laser …

[PDF][PDF] 11.3 Via Drilling

M Hessling, J Ihlemann - researchgate.net
Six years after the first commercial excimer lasers had found their way into research
laboratories, in 1982 Srinivasan and co-workers reported their discovery of the laser …

[PDF][PDF] Development and optimization of high intensity solid state-excimer hybrid laser systems and their application for short pulse material processing

J Békési - 2003 - core.ac.uk
Over the last years a revolution has occurred in our ability to produce high power and
extremely high intensity pulses using more and more compact laser systems. The key …