Effect of overheat and direct flow loading on the mems bistable flow sensor

I Litvinov, D Refaeli, A Liberzon, S Krylov - Sensors and Actuators A …, 2024 - Elsevier
We present the findings from an experimental study of a MEMS flow sensor in which an
initially curved, double-clamped bistable microbeam is the primary sensing element. Our …

Carbon nanofiber-reinforced Pt thin film-based airflow sensor for respiratory monitoring

SA Moshizi, A Abedi, CJ Pastras, S Peng, S Wu… - Sensors and Actuators A …, 2022 - Elsevier
Recognizing abnormal respiratory patterns is vital for detecting emergency signs or
symptoms for diagnosing disease and dysfunction. This paper suggests design and …

[HTML][HTML] Fluid classification with integrated flow and pressure sensors using machine learning

D Alveringh, DV Le, J Groenesteijn, J Schmitz… - Sensors and Actuators A …, 2023 - Elsevier
This paper describes fluid classification methods using machine learning applied on a
microfabricated Coriolis mass flow sensor with integrated pressure sensors. The latter are …

[HTML][HTML] Long-term operational stability of Ta/Pt thin-film microheaters: impact of the Ta adhesion layer

IA Kalinin, IV Roslyakov, DN Khmelenin, KS Napolskii - Nanomaterials, 2022 - mdpi.com
Microheaters with long-term stability are crucial for the development of a variety of
microelectronic devices operated at high temperatures. Structured Ta/Pt bilayers, in which …

[HTML][HTML] SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

J Jang, G Panusa, G Boero, J Brugger - Microsystems & …, 2022 - nature.com
Glass-like carbon (GC) is a nongraphitizing material composed entirely of carbon atoms
produced from selected organic polymer resins by controlled pyrolysis in an inert …

Recent trends in structures and applications of valveless piezoelectric pump—A review

Y Hou, L He, D Hu, L Zhang, B Yu… - … of Micromechanics and …, 2022 - iopscience.iop.org
Piezoelectric actuator-driven valveless pump has been studied for a long time in theory and
structure for the features of high precision, fast response, low power consumption, compact …

[HTML][HTML] Microfluidic thermal flowmeters for drug injection monitoring

I Doh, D Sim, SS Kim - Sensors, 2022 - mdpi.com
This paper presents a microfluidic thermal flowmeter for monitoring injection pumps, which is
essential to ensure proper patient treatment and reduce medication errors that can lead to …

Development of a biomimetic semicircular canal with MEMS sensors to restore balance

MA Raoufi, SA Moshizi, A Razmjou, S Wu… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
A third of adults over the age of 50 suffer from chronic impairment of balance, posture, and/or
gaze stability due to partial or complete impairment of the sensory cells in the inner ear …

Effect of the phase composition of iron oxide nanorods on SO2 gas sensing performance

TV Nguyen, NA Luong, VT Nguyen, AT Pham… - Materials Research …, 2021 - Elsevier
Abstract α-FeOOH nanorods were synthesized by a facile precipitation method. γ-Fe 2 O 3
and α-Fe 2 O 3 nanorods were then obtained by calcining for 6 h at 200 and 600° C in …

Near-field electrospinning-enabled direct-write P (VDF-TrFE) nano/micro-fiber-based piezoelectric film for a high-performance airflow sensor

J Hu, J Chen, P Liu, S Fan, W Duan - Sensors and Actuators A: Physical, 2022 - Elsevier
Airflow sensor is a crucial component in many engineering settings, such as sustainable
energy utilization, environmental monitoring, weather forecasting, and aerospace …