Micromachined thermal gas sensors—A review

ELW Gardner, JW Gardner, F Udrea - Sensors, 2023 - mdpi.com
In recent years, there has been a growing desire to monitor and control harmful substances
arising from industrial processes that impact upon our health and quality of life. This has led …

[图书][B] Resistive, capacitive, inductive, and magnetic sensor technologies

WY Du - 2014 - books.google.com
Sensor technologies have experienced dramatic growth in recent years, making a significant
impact on national security, health care, environmental improvement, energy management …

Bidirectional CMOS-MEMS airflow sensor with sub-mW power consumption and high sensitivity

W Xu, X Wang, Z Ke, YK Lee - IEEE Transactions on Industrial …, 2021 - ieeexplore.ieee.org
This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …

A CMOS-MEMS thermoresistive micro calorimetric flow sensor with temperature compensation

W Xu, S Ma, X Wang, Y Chiu… - Journal of …, 2019 - ieeexplore.ieee.org
In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor
model for moist airflow with the temperature-dependent thermophysical properties. The 1D …

[PDF][PDF] Issues and temperature compensation techniques for hot wire thermal flow sensor: A review

N Khamshah, AN Abdalla, SP Koh, HF Rashag - Int. J. Phys. Sci, 2011 - researchgate.net
The hot-wire anemometer is used extensively to measure velocity and turbulence quantities.
Hot-wire measurement of non-isothermal flows necessitate the use of thermal compensation …

Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35 μm CMOS MEMS technology

W Xu, B Gao, S Ma, A Zhang, Y Chiu… - 2016 IEEE 29th …, 2016 - ieeexplore.ieee.org
In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow
(T2MCF) sensor by using a commercial 0.35 μm 2P4M CMOS MEMS technology is reported …

Mechanical wind sensor based on additive manufacturing technology

Y Ye, S Wan, S Li, X He - IEEE Transactions on Instrumentation …, 2022 - ieeexplore.ieee.org
In this article, a mechanical wind sensor based on additive manufacturing technology is
demonstrated for the first time. The sensor is composed of a cylindrical sensing structure …

Response time of thermal flow sensors with air as fluid

C Sosna, T Walter, W Lang - Sensors and Actuators A: Physical, 2011 - Elsevier
Due to their fast response time miniaturized thermal flow sensors can be applied well for the
measurement of instationary gas flow. For some applications, the response time of the …

Temperature compensation for thermal anemometers using temperature sensors independent of flow sensors

RY Que, R Zhu, QZ Wei, Z Cao - Measurement Science and …, 2011 - iopscience.iop.org
In this paper, a new temperature compensation technique for thermal anemometers is
presented. The compensation is realized by using a temperature sensor independent of the …

A thermal-calorimetric gas flow meter with improved isolating feature

Y Valizadeh Yaghmourali, N Ahmadi… - Microsystem …, 2017 - Springer
This paper presents design and characterization of a novel thermal-calorimetric flow-meter
using suspended-cantilever-structure. There is an air gap between the heater and each …