Topological constraint theory (TCT) has revealed itself to be a powerful tool in interpreting
the behaviors of amorphous solids. The theory predicts a transition between a “rigid” …

Comprehensive ex-situ and in-situ investigations of thermal curing processes in spin-on
ultra-low-k thin films conducted by positron annihilation spectroscopy and Fourier transform …

A template dependence of the degree of self-hydrophobization of methylene-bridged
periodic mesoporous organosilica (PMO) films is reported. The film with the smallest pore …

An interlayer dielectric with an extremely low dielectric constant of 1.96 is demonstrated
using SiO 2 with vertically aligned cylindrical pores. Vertically grown carbon nanotubes are …

The use of a single material as a multifunctional insulator (ie substrate, gate dielectric, and
passivation layer) in the same device will reduce cost and improve the sustainability of …

Были приготовлены пленкообразующие растворы для золь-гель-формирования тонких
плотных и пористых органоалкиленсилоксановых (ОАС) пленок на основе …

This article is devoted to the in situ application of spectral reflectometry in conditions of
cryogenic etching of thin films. Two main control methods—laser and spectral reflectometry …

Organosilicate glass (OSG) films are a vital component in modern electronic devices, with
their electrical properties playing a crucial role in device performance. This comprehensive …

Hybrid organosilicate glass materials have unique properties and functionalities due to
combining characteristics of organic and inorganic species which renders them a very …

To lower interconnect signal delay, the industry continues to work on the integration of low-k
interlayer dielectrics (ILD). Porosity is often added to further reduce dielectric constant and …