Designing high χ copolymer materials for nanotechnology applications: A systematic bulk vs. thin films approach

PP Angelopoulou, I Moutsios, GM Manesi… - Progress in Polymer …, 2022 - Elsevier
This review article discusses the origins of self-assembly behavior of linear and non-linear
block co-and terpolymers and their application towards the fabrication of high-resolution …

Nanoparticle Assembly: From Self‐Organization to Controlled Micropatterning for Enhanced Functionalities

S Jambhulkar, D Ravichandran, Y Zhu, V Thippanna… - Small, 2024 - Wiley Online Library
Nanoparticles form long‐range micropatterns via self‐assembly or directed self‐assembly
with superior mechanical, electrical, optical, magnetic, chemical, and other functional …

High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching

A Esmeraldo Paiva, MS Gerlt, NF Laubli… - … applied materials & …, 2023 - ACS Publications
The reliable and regular modification of the surface properties of substrates plays a crucial
role in material research and the development of functional surfaces. A key aspect of this is …

A new and versatile template towards vertically oriented nanopillars and nanotubes

B Xu, D Wu, IM Hill, M Halim, Y Rubin, Y Wang - Nanoscale Advances, 2023 - pubs.rsc.org
Vertically oriented nanostructures bring unparalleled high surface area, light trapping
capability, and high device density to electronic, optoelectronic, and energy storage devices …

Controlled Anisotropic Wetting by Plasma Treatment for Directed Self-Assembly of High-χ Block Copolymers

AF Putranto, C Petit-Etienne, S Cavalaglio… - … Applied Materials & …, 2024 - ACS Publications
The directed self-assembly (DSA) of block copolymers (BCPs) is a promising next-
generation lithography technique for high-resolution patterning. However, achieving …

Hydrolysis-Induced Morphology Evolution of Linear and Bottlebrush Block Copolymers in Thin Films with Acid Vapor or Photoacid Generators

M Hu, X Li, J Rzayev, TP Russell - Macromolecules, 2024 - ACS Publications
The self-assembly of high-χ low-N block copolymers (BCPs) can give patterns with sub-10
nm full pitch, serving as a promising alternative to photolithographic methods. In this work …

先进光刻材料.

李自力, 徐兴冉, 湛江浩, 胡晓华… - Chinese Journal of …, 2022 - search.ebscohost.com
摘要随着半导体产业的技术发展与进步, 芯片制造在摩尔定律的推动下也在不断向先进工艺节点
推进. 与此同时, 我们迫切需要开发与之相匹配的光刻材料来满足光刻图形化的快速发展需求 …

[PDF][PDF] 亚十纳米导向自组装与深紫外混合光刻技术

李自力, 胡晓华, 熊诗圣 - Laser & Optoelectronics Progress, 2022 - researching.cn
摘要光刻图形化工艺对芯片制造乃至于现代信息技术的发展起着至关重要的作用.
随着微电子器件关键尺寸的持续微缩, 芯片制造工艺日益演进, 迫切需要立足国内产业现状 …

Grain size effect on the plasma etching behavior of spark plasma sintered yttria-stabilized zirconia ceramics

H Shim, HH Kim, S Hong, JH Kim, HC Lee, YJ Park… - Ceramics …, 2024 - Elsevier
Yttria-stabilized zirconia (YSZ) ceramics with various grain sizes were fabricated via a spark
plasma sintering (SPS), and their plasma etching properties were investigated, particularly …

[PDF][PDF] Fabrication of Nanoporous Membrane-like Thin Layers via Block Copolymer Lithography of P2VP-b-PS “Inverse” Systems and their Potential Applications

AE Paiva - 2024 - tara.tcd.ie
The large-scale fabrication of nanoporous materials and substrates has generated
significant research interest on account of the wide range of possible applications, including …