摘要扫描白光干涉术是目前最精确的表面形貌测量技术之一, 被广泛应用于工业与科研领域.
从发明至今的三十余年间, 在精密光学, 半导体, 汽车及航天等先进制造领域的需求牵引下 …

In this Letter, we report a study on the effects of spatial filtering for a transmission Mueller
matrix imaging system. A spatial filter (SF) is placed on the back Fourier plane of the imaging …

Scanning white light interferometry is one of the most accurate surface topography
measurement techniques. It is widely used in various industrial and scientific research fields …

Coherence scanning interferometry (CSI), based on the principle of interference, can
achieve sub-nanometer precision for height measurements. On the other hand, focus …

Ultra-smooth surfaces require stringent quality control of their high spatial frequency
roughness (HSFR). Angle-resolved scattering (ARS) allows for fast, non-contact roughness …

Abstract Angle-Resolved Scatterometry (ARS) enables the acquisition of images at the back
focal plane (BFP) of the objective lens. These images contain target geometry information …

Nanostructures with steep side wall angles (swa) play a pivotal role in various technological
applications. Accurate characterization of these nanostructures is crucial for optimizing their …

The accuracy of the Mueller polarimeter is usually affected by Gaussian–Poisson mixed
noise, and by optimizing the instrument matrices of polarization state generator and …

The mZPBC white-light topography measurement method is proposed. In contrast with other
methods, this algorithm has a real physical model and directly solves the accurate …

Model-based optical scatterometry is a widely utilized non-destructive measuring technique
in semiconductor manufacturing for retrieving features on wafers. It offers an attractive …