With the continuous advancements in microelectromechanical systems (MEMS) fabrication
technology, inertial sensors like accelerometers and gyroscopes can be designed and …

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state
while the environmental accelerations satisfy threshold value. An exhaustive summary of the …

A miniature tilt sensor made of standard microelectromechanical systems accelerometers
and with an accuracy of 0.3 deg over the full measurement range of pitch and roll is …

The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal
and long-term drifts, imprecise factory calibration, and aging phenomena. In order to reduce …

In order to build a tilt sensor having a desired sensitivity and measuring range, one should
select an appropriate type, orientation, and initial position of an accelerometer. Various …

Effects of a fully natural aging of MEMS accelerometers are evaluated with regard to
changes in their performance. Two models of commercial dual-axis accelerometers (two …

This paper presents realization of a MEMS piezoresistive single axis accelerometer using
dual doped TMAH solution. The silicon micromachined structure consists of a heavy …

The CMOS compatible bulk micromachined piezoresistive accelerometer presented in this
paper consists of four flexures supporting a proof mass. Four pairs of boron-diffused …

Nowadays quick fabrication of mechanical spare and replacement has become more and
more necessary. This is the main reason why rapid prototyping and additive manufacturing …

The paper discusses thoroughly a problem of determining tilt over various measurement
ranges by measuring Cartesian components of the gravity acceleration with application of …