Precision motion systems are the core of a wide range of manufacturing equipment and
scientific instruments, and their motion performance directly determines the quality and …

The design of high-precision motion stages, which must exhibit high dynamic performance,
is a challenging task. Manual design is difficult, time-consuming, and leads to sub-optimal …

The feed system is a typical mechatronics system, as well as motion control equipment, that
serves as a fundamental component of CNC machine tools. Developing a precise …

Technology in a broad sense is driven by developments in semiconductor technology,
particularly with respect to the computational power of devices and systems, as well as …

Fault diagnosis systems are essential in precision mechatronics to facilitate maintenance
and to minimize downtime. The aim of this paper is to describe the current trend in control for …

The design of high-performance mechatronic systems is very challenging, as it requires
delicate balancing of system dynamics, the controller, and their closed-loop interaction …

Iterative learning control (ILC) enables high control performance through learning from the
measured data, using only limited model knowledge in the form of a nominal parametric …

摘要对于步进扫描投影光刻机, 掩模台和工件台的同步伺服性能将直接影响整机技术指标.
掩模台和工件台是典型的六自由度超精密运动台, 在耦合动力学, 复杂内外部干扰条件下兼顾高 …

Increasingly stringent performance requirements for motion control necessitate the use of
increasingly detailed models of the system behavior. Motion systems inherently move …

The linear parameter-varying framework enables systematic control design approaches to
meet increasing performance requirements and complexity of systems. The aim of this letter …