Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration
This paper presents a surface-micromachining technology to fabricate silicon carbide (SiC)-
based capacitive micromachined ultrasonic transducers (CMUTs). The use of dc-sputtered …
based capacitive micromachined ultrasonic transducers (CMUTs). The use of dc-sputtered …
A novel prototyping method for die-level monolithic integration of MEMS above-IC
This work presents a convenient and versatile prototyping method for integrating surface-
micromachined microelectromechanical systems (MEMS) directly above IC electronics, at …
micromachined microelectromechanical systems (MEMS) directly above IC electronics, at …