3D silicon photonic-electronic integrated circuits for computing, networking, and imaging applications
SJB Yoo - 2018 23rd Opto-Electronics and Communications …, 2018 - ieeexplore.ieee.org
We discuss design, fabrication, and integration methods of 3D microsystems consisting of
silicon photonic and electronic components integrated in 3D on a silicon substrate. Their …
silicon photonic and electronic components integrated in 3D on a silicon substrate. Their …