Optical spectroscopy is a powerful, nonintrusive diagnostic tool that can provide
unparalleled insight into fundamental plasma properties. Specifically, these techniques are …

The etch characteristics of silicon trenches masked with various SiO 2/Si 3 N 4 pattern
distances were investigated using synchronously and asynchronously pulse modes in …

A fully relativistic Dirac B-spline R-matrix (DBSR) method is applied to calculate the
oscillator strengths and electron-impact excitation cross sections involving the 5s 2 5p 5 …

Phase resolved optical emission spectroscopy (PROES) measurements were combined with
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …

The authors report on phase resolved optical emission spectroscopy (PROES)
measurements of pulsed capacitive coupled plasmas (CCPs) through argon. The PROES …

In this work, experimental and theoretical study of pulsed discharge in argon has been
carried out. The experimental data on the dynamics of electron density, electron …

The experimental and theoretical study of radiofrequency capacitively coupled plasma
discharge afterglow has been carried out. Temporal dynamics of Ar metastable and …

An experimental study on the role of an external longitudinal magnetic field on the
characteristics changes of pulsed plasma stream, produced in argon medium, is carried out …

Natural and human-produced plasmas cover a vast parameter space with a rich array of
properties that bear on science and engineering problems spanning many disciplines. A …

In this work, an optimization algorithm was proposed for plasma diagnostic modeling based
on a statistical analysis of reduced population density distribution. The algorithm generates …