Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects

SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …

Mechanical stability of porous low-k dielectrics

K Vanstreels, C Wu, MR Baklanov - ECS Journal of Solid State …, 2014 - iopscience.iop.org
This paper reviews the mechanical and fracture properties of porous ultralow-k dielectrics
with the focus on chip package interaction related issues. It is shown that the mechanical …

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

MR Baklanov, V Jousseaume, TV Rakhimova… - Applied Physics …, 2019 - pubs.aip.org
This paper presents an in-depth overview of the application and impact of UV/VUV light in
advanced interconnect technology. UV light application in BEOL historically was mainly …

Cross-Linkable, Solvent-Resistant Fullerene Contacts for Robust and Efficient Perovskite Solar Cells with Increased JSC and VOC

BL Watson, N Rolston, KA Bush, T Leijtens… - … applied materials & …, 2016 - ACS Publications
The active layers of perovskite solar cells are also structural layers and are central to
ensuring that the structural integrity of the device is maintained over its operational lifetime …

Beyond the highs and lows: A perspective on the future of dielectrics research for nanoelectronic devices

M Jenkins, DZ Austin, JF Conley, J Fan… - ECS Journal of Solid …, 2019 - iopscience.iop.org
High-dielectric constant (high-k) gate oxides and low-dielectric constant (low-k) interlayer
dielectrics (ILD) have dominated the nanoelectronic materials research scene over the past …

Reliability study of 3D IC packaging based on through-silicon interposer (TSI) and silicon-less interconnection technology (SLIT) using finite element analysis

FX Che, X Zhang, JK Lin - Microelectronics Reliability, 2016 - Elsevier
Abstract Three-dimensional (3D) integration using the through-silicon via (TSV) approach
becomes one promising technology in 3D packaging. 2.5 D through-silicon interposer (TSI) …

Chip–Package Interaction and Reliability Improvement by Structure Optimization for Ultralow- Interconnects in Flip-Chip Packages

X Zhang, Y Wang, JH Im, PS Ho - IEEE Transactions on Device …, 2012 - ieeexplore.ieee.org
Mechanical failures in low-k interlayer dielectrics and related interfaces during flip-chip-
packaging processes have raised serious reliability concerns. The problem can be traced to …

Cohesive zone modeling for structural integrity analysis of IC interconnects

BAE Van Hal, RHJ Peerlings, MGD Geers… - Microelectronics …, 2007 - Elsevier
Due to the miniaturization of integrated circuits, their thermo-mechanical reliability tends to
become a truly critical design criterion. Especially the introduction of copper and low-k …

Thermomechanical fatigue damage modeling and material parameter calibration for thin film metallizations

P Hoffmann, S Moser, C Kofler, M Nelhiebel… - International Journal of …, 2022 - Elsevier
Numerical fatigue damage models can help to save cost and time when studying fatigue
damage in the copper metallization layers of power semiconductor devices. However, their …

Stress Analysis and Design Optimization for Low- Chip With Cu Pillar Interconnection

FX Che, JK Lin, KY Au, HY Hsiao… - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
Cu pillar technology can cater for high I/O, fine pitch, and miniaturization requirements
compared with wire bonding and conventional solder flip-chip technologies. However, chip …