Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures

RP Lu, KL Kavanagh, SJ Dixon-Warren… - Journal of Vacuum …, 2001 - pubs.aip.org
Two-dimensional carrier profiling using scanning spreading resistance microscopy (SSRM)
has recently been reported for Si-and InP-based structures. In this article, we report SSRM …
被引用次数：39 相关文章

[引用][C] Calibrated scanning spreading resistance microscopy profiling of carriers in III-V structures

RP Lu, KL Kavanagh… - Journal of Vacuum …, 2001 - ui.adsabs.harvard.edu
Calibrated scanning spreading resistance microscopy profiling of carriers in III-V structures -
NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS Calibrated …

Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures

RP Lu, KL Kavanagh, SJ Dixon-Warren… - Journal of Vacuum …, 2001 - pubs.aip.org
Two-dimensional carrier profiling using scanning spreading resistance microscopy (SSRM)
has recently been reported for Si-and InP-based structures. In this article, we report SSRM …
[PDF] academia.edu

[PDF][PDF] Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures

RP Lu, KL Kavanagh, DW St J, A Kuhl… - academia.edu
The boom in the optoelectronics industry and evershrinking device dimensions bring the
need for a fast and quantitative method for two-dimensional (2D) carrier profiling with …
[PDF] researchgate.net

[PDF][PDF] Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures

RP Lu, KL Kavanagh, DW St J, A Kuhl… - researchgate.net
The boom in the optoelectronics industry and evershrinking device dimensions bring the
need for a fast and quantitative method for two-dimensional (2D) carrier profiling with …