O3-Annealing Effect on the Etching Resilience of a TiO2/Al2O3 filter Prepared by Atomic Layer Deposition
This research investigates the improvements of ozone (O3) annealing on the optical and
etching characteristics of TiO2/Al2O3 multilayer band-pass filters designed for potential …
etching characteristics of TiO2/Al2O3 multilayer band-pass filters designed for potential …
O3-Annealing Effect on the Etching Resilience of a TiO2/Al2O3 filter Prepared by Atomic Layer Deposition.
JL Vazquez, J López, C Bohórquez… - … Applied Materials & …, 2023 - europepmc.org
This research investigates the improvements of ozone (O 3) annealing on the optical and
etching characteristics of TiO 2/Al 2 O 3 multilayer band-pass filters designed for potential …
etching characteristics of TiO 2/Al 2 O 3 multilayer band-pass filters designed for potential …
O3-Annealing Effect on the Etching Resilience of a TiO2/Al2O3 filter Prepared by Atomic Layer Deposition
JL Vazquez, J López, C Bohórquez… - … applied materials & …, 2023 - pubmed.ncbi.nlm.nih.gov
This research investigates the improvements of ozone (O 3) annealing on the optical and
etching characteristics of TiO 2/Al 2 O 3 multilayer band-pass filters designed for potential …
etching characteristics of TiO 2/Al 2 O 3 multilayer band-pass filters designed for potential …