Analysis and design of a novel RF MEMS switch with low pull-down voltage, high return loss, and high isolation at 10-60GHz
J Zhou, F Yang, K Deng, C Lai - 2023 - researchsquare.com
This paper presents a novel radio frequency micro-electro-mechanical systems (RF MEMS)
switch fabricated on a high resistivity silicon substrate. Slots, like square interleaved slots …
switch fabricated on a high resistivity silicon substrate. Slots, like square interleaved slots …
Analysis and design of a novel RF MEMS switch with low pull-down voltage, high return loss, and high isolation at 10-60GHz
J Zhou, F Yang, K Deng, C Lai - 2023 - europepmc.org
This paper presents a novel radio frequency micro-electro-mechanical systems (RF MEMS)
switch fabricated on a high resistivity silicon substrate. Slots, like square interleaved slots …
switch fabricated on a high resistivity silicon substrate. Slots, like square interleaved slots …