Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov, AV Uvarov… - Journal of Vacuum …, 2018 - pubs.aip.org
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …
被引用次数：26 相关文章
[PDF] researchgate.net

[PDF][PDF] Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov, AV Uvarov… - Journal of Vacuum …, 2018 - researchgate.net
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …

Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov, AV Uvarov… - Journal of Vacuum …, 2018 - elibrary.ru
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …

Low temperature plasma enhanced deposition of GaP films on Si substrate

A Gudovskikh, I Morozov, A Uvarov… - Journal of Vacuum …, 2018 - hal.science
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …

Low temperature plasma enhanced deposition of GaP films on Si substrate

A Gudovskikh, I Morozov, A Uvarov… - … & Technology A, 2018 - centralesupelec.hal.science
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …

Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov, AV Uvarov… - Journal of Vacuum …, 2018 - pubs.aip.org
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …
[PDF] archive.org

[PDF][PDF] Low temperature plasma enhanced deposition of GaP films on Si substrate

A Gudovskikh, I Morozov, A Uvarov… - Journal of Vacuum …, 2018 - scholar.archive.org
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …

[引用][C] Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov, AV Uvarov… - Journal of Vacuum …, 2018 - hero.epa.gov
Low temperature plasma enhanced deposition of GaP films on Si substrate | Health &
Environmental Research Online (HERO) | US EPA Jump to main content US EPA United …

[引用][C] Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov… - Journal of Vacuum …, 2018 - ui.adsabs.harvard.edu
Low temperature plasma enhanced deposition of GaP films on Si substrate - NASA/ADS
Now on home page ads icon ads Enable full ADS view NASA/ADS Low temperature …
[PDF] hal.science

[PDF][PDF] Low temperature plasma enhanced deposition of GaP films on Si substrate

AS Gudovskikh, IA Morozov… - … & Technology A, 2018 - centralesupelec.hal.science
Amorphous and microcrystalline GaP films were deposited on Si substrates by time
modulated plasma enhanced deposition from trimethylgallium and phosphine using …