Silicon nitride passive and active photonic integrated circuits: trends and prospects
The use of silicon nitride in integrated photonics has rapidly progressed in recent decades.
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …
[PDF][PDF] Silicon nitride passive and active photonic integrated circuits: trends and prospects
C XIANG, W JIN, JE BOWERS - researching.cn
In CMOS electronic integrated circuit technology, silicon nitride (SiN) has been used for
diffusion barriers or passivation layers [1]. Due to its wide availability, silicon nitride has also …
diffusion barriers or passivation layers [1]. Due to its wide availability, silicon nitride has also …
Silicon nitride passive and active photonic integrated circuits: trends and prospects
C Xiang, W Jin, JE Bowers - Photonics Research, 2022 - hub.hku.hk
The use of silicon nitride in integrated photonics has rapidly progressed in recent decades.
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …
Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research …