High-quality-factor AlGaAs-on-sapphire microring resonators

Y Zheng, M Pu, HK Sahoo, E Semenova… - Journal of Lightwave …, 2019 - opg.optica.org
We realize an AlGaAs-on-sapphire platform through-assisted direct wafer bonding and
substrate removal processes. The direct wafer bonding process is optimized concerning the …
被引用次数：42 相关文章

[引用][C] High-Quality-Factor AlGaAs-on-Sapphire Microring Resonators

Y Zheng, M Pu, HK Sahoo… - Journal of Lightwave …, 2019 - ui.adsabs.harvard.edu
High-Quality-Factor AlGaAs-on-Sapphire Microring Resonators - NASA/ADS Now on home
page ads icon ads Enable full ADS view NASA/ADS High-Quality-Factor AlGaAs-on-Sapphire …

High-quality-factor AlGaAs-on-sapphire microring resonators

Y Zheng, M Pu, HK Sahoo, E Semenova… - Journal of Lightwave …, 2019 - elibrary.ru
Manuscript received March 9, 2018; revised June 28, 2018, September 12, 2018, and
October 29, 2018; accepted November 13, 2018. Date of publication November 19, 2018; …
[PDF] core.ac.uk

[PDF][PDF] High-Quality-Factor AlGaAs-On-Sapphire Microring Resonators

Y Zheng, M Pu, HK Sahoo, E Semenova, K Yvind - 2016 - core.ac.uk
We realize an AlGaAs-on-sapphire platform through Al2O3-assisted direct wafer bonding
and substrate removal processes. The direct wafer bonding process is optimized concerning …

High-Quality-Factor AlGaAs-On-Sapphire Microring Resonators

Y Zheng, M Pu, HK Sahoo, E Semenova… - Journal of Lightwave …, 2018 - orbit.dtu.dk
We realize an AlGaAs-on-sapphire platform through a Al< formula>< tex> $ _2 $ O<
formula>< tex> $ _3 $-assisted direct wafer bonding and substrate removal processes. The …

High-Quality-Factor AlGaAs-on-Sapphire Microring Resonators

Y Zheng, M Pu, HK Sahoo… - Journal of Lightwave …, 2018 - ieeexplore.ieee.org
We realize an AlGaAs-on-sapphire platform through Al 2 O 3-assisted direct wafer bonding
and substrate removal processes. The direct wafer bonding process is optimized concerning …
[PDF] archive.org

[PDF][PDF] High-Quality-Factor AlGaAs-On-Sapphire Microring Resonators

Y Zheng, M Pu, HK Sahoo, E Semenova, K Yvind - 2016 - scholar.archive.org
We realize an AlGaAs-on-sapphire platform through Al2O3-assisted direct wafer bonding
and substrate removal processes. The direct wafer bonding process is optimized concerning …