Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng, C Lee - Journal of Micromechanics and …, 2021 - cir.nii.ac.jp
抄録< jats: title> Abstract</jats: title>< jats: p> The rapid development of the fifth-generation
mobile networks (5G) and Internet of Things (IoT) is inseparable from a large number of …

Piezoelectric MEMS-evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - … of Micromechanics and …, 2022 - ui.adsabs.harvard.edu
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …