[PDF][PDF] Impact of charging mechanisms on the reliability of RF MEMS devices
P Czarnecki - 2010 - lirias.kuleuven.be
The growth of MEMS (micro electro-mechanical systems) technology, initiated by Nathanson
et al. in 1967 with the presentation of the first micro electro-mechanical device (the resonant …
et al. in 1967 with the presentation of the first micro electro-mechanical device (the resonant …