Suspended cantilever waveguide

L Chen, C Doerr, L Chen - US Patent 10,571,633, 2020 - Google Patents
Cantilevered waveguides suspended above an air cavity in an underlying substrate are
described. The waveguide is formed by patterning a waveguide layer in some embodi …
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Suspended cantilever waveguide

L Chen, C Doerr, L Chen - US Patent 10,571,633, 2020 - freepatentsonline.com
Cantilevered waveguides suspended above an air cavity in an underlying substrate are
described. The waveguide is formed by patterning a waveguide layer in some embodiments …