Method for manufacturing a vibrating MEMS circuit
SS Li, S Lee, K Bhattacharjee - US Patent 9,369,105, 2016 - Google Patents
6,249,073 B1 6/2001 Nguyen et al. 6,336,366 B1 1/2002 Thundat et al. 6,349,454 B1*
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …
Method for manufacturing a vibrating MEMS circuit
S Li, S Lee, K Bhattacharjee - US Patent 9,369,105, 2016 - freepatentsonline.com
A method for making a micro-electro-mechanical systems (MEMS) vibrating structure is
disclosed. The MEMS is supported by a MEMS anchor system and includes a single-crystal …
disclosed. The MEMS is supported by a MEMS anchor system and includes a single-crystal …