A ruthenium-based multimetal-contact RF MEMS switch with a corrugated diaphragm

F Ke, J Miao, J Oberhammer - Journal of …, 2008 - ieeexplore.ieee.org
This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …
被引用次数：97 相关文章

[引用][C] A Ruthenium-Based Multimetal-Contact RF MEMS Switch with a Corrugated Diaphragm

F KE - J. Microelectromech. Syst., 2008 - cir.nii.ac.jp
A Ruthenium-Based Multimetal-Contact RF MEMS Switch with a Corrugated Diaphragm | CiNii
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F Ke, J Miao, J Oberhammer - Journal of Microelectromechanical Systems, 2008 - infona.pl
This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …

[引用][C] A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F KE, J MIAO, J OBERHAMMER - Journal of …, 2008 - pascal-francis.inist.fr
A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm
CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F Ke, J Miao, J Oberhammer - Journal of microelectromechanical …, 2008 - swepub.kb.se
This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F Ke, J Miao, J Oberhammer - Journal of microelectromechanical …, 2008 - diva-portal.org
This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F Ke, J Miao, J Oberhammer - Journal of microelectromechanical …, 2008 - swepub.kb.se
This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …

[引用][C] A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

F KE, J MIAO, J OBERHAMMER - Journal of …, 2008 - Institute of Electrical and Electronics …