Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas

M Mori, S Irie, Y Osano, K Eriguchi… - Journal of Vacuum Science …, 2021 - pubs.aip.org
Feature profiles of Si etched in HBr-containing plasmas have been analyzed through a
comparison between experiments and simulations. The emphasis was placed on a …
被引用次数：9 相关文章

[引用][C] Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas

M Mori, S Irie, Y Osano, K Eriguchi… - Journal of Vacuum …, 2021 - ui.adsabs.harvard.edu
Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas -
NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS Model analysis …

Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas

M Mori, S Irie, Y Osano, K Eriguchi… - Journal of Vacuum Science …, 2021 - pubs.aip.org
Feature profiles of Si etched in HBr-containing plasmas have been analyzed through a
comparison between experiments and simulations. The emphasis was placed on a …

Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas

M Mori, S Irie, Y Osano, K Eriguchi, K Ono - Journal of Vacuum Science & …, 2021 - cir.nii.ac.jp
抄録< jats: p> Feature profiles of Si etched in HBr-containing plasmas have been analyzed
through a comparison between experiments and simulations. The emphasis was placed on …