Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic compressive stress

D Okumura, J Sugiura, H Tanaka… - International Journal of …, 2018 - Elsevier
In this study, we investigate buckling and postbuckling of etching-induced wiggling in a
bilayer structure consisting of mask and masked layers. To show effects of explicit modeling …
被引用次数：18 相关文章

[引用][C] Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic compressive stress

D Okumura, J Sugiura, H Tanaka… - International Journal of …, 2018 - cir.nii.ac.jp
Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic
compressive stress | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ …

[引用][C] Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic compressive stress

D Okumura, J Sugiura, H Tanaka… - International Journal of …, 2018 - cir.nii.ac.jp
Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic
compressive stress | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ …