Semiconductor device having an airgap defined at least partially by a protective structure
An apparatus includes a first interconnect and a first barrier structure. The first barrier
structure is in contact with a dielectric material. The apparatus further includes a first …
structure is in contact with a dielectric material. The apparatus further includes a first …
Semiconductor device having an airgap defined at least partially by a protective structure
JJ Zhu, JJ Xu, CF Yeap, SS Song… - US Patent …, 2018 - freepatentsonline.com
An apparatus includes a first interconnect and a first barrier structure. The first barrier
structure is in contact with a dielectric material. The apparatus further includes a first …
structure is in contact with a dielectric material. The apparatus further includes a first …
Semiconductor device having an airgap defined at least partially by a protective structure
JJ Zhu, JJ Xu, C fei Yeap, SS Song… - US Patent App. 14 …, 2016 - Google Patents
0002 Advances in technology have resulted in smaller apparatuses and more powerful
computing devices. For example, there currently exist a variety of portable personal …
computing devices. For example, there currently exist a variety of portable personal …
SEMICONDUCTOR DEVICE HAVING AN AIRGAP DEFINED AT LEAST PARTIALLY BY A PROTECTIVE STRUCTURE
JJ Zhu, JJ Xu, CF Yeap, SS Song… - US Patent App. 14 …, 2016 - freepatentsonline.com
An apparatus includes a first interconnect and a first barrier structure. The first barrier
structure is in contact with a dielectric material. The apparatus further includes a first …
structure is in contact with a dielectric material. The apparatus further includes a first …