Materials selection approaches and fabrication methods in RF MEMS switches

Kurmendra, R Kumar - Journal of Electronic Materials, 2021 - Springer
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …
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Materials Selection Approaches and Fabrication Methods in RF MEMS Switches

R Kumar - Journal of Electronic Materials, 2021 - search.proquest.com
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

Materials Selection Approaches and Fabrication Methods in RF MEMS Switches

K Kurmendra - Journal of Electronic Materials, 2021 - ui.adsabs.harvard.edu
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

Materials Selection Approaches and Fabrication Methods in RF MEMS Switches.

R Kumar - Journal of Electronic Materials, 2021 - search.ebscohost.com
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …