Collimated phase measuring deflectometry

L Huang, T Wang, C Austin, L Lienhard, Y Hu… - Optics and Lasers in …, 2024 - Elsevier
Phase measuring deflectometry has been applied for free-form specular surface metrology,
but its measured slope results are sensitive to the depth of sample positioning, which is also …

Collimated phase measuring deflectometry

L Huang, T Wang, C Austin, L Lienhard, Y Hu… - Optics and Lasers in …, 2023 - osti.gov
Phase measuring deflectometry has been applied for free-form specular surface metrology,
but its measured slope results are sensitive to the depth of sample positioning, which is also …

[PDF][PDF] Collimated phase measuring deflectometry

L Huang, T Wang, C Austin, L Lienhard, Y Hu… - Optics and Lasers in …, 2024 - bnl.gov
Phase measuring deflectometry has been applied for free-form specular surface metrology,
but its measured slope results are sensitive to the depth of sample positioning, which is also …

Collimated phase measuring deflectometry

L Huang, T Wang, C Austin… - Optics and Lasers …, 2024 - ui.adsabs.harvard.edu
Phase measuring deflectometry has been applied for free-form specular surface metrology,
but its measured slope results are sensitive to the depth of sample positioning, which is also …