Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L Lallement, A Rhallabi… - … Sources Science and …, 2009 - iopscience.iop.org
A global model has been developed for low-pressure (3–20 mTorr), radio-frequency
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L Lallement, A Rhallabi, C Cardinaud… - … Sources Science and …, 2009 - inis.iaea.org
[en] A global model has been developed for low-pressure (3-20 mTorr), radio-frequency
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
Global model and diagnostic of a low-pressure SF {sub 6}/Ar inductively coupled plasma
L Lallement, A Rhallabi, C Cardinaud… - … Sources Science and …, 2009 - osti.gov
A global model has been developed for low-pressure (3-20 mTorr), radio-frequency
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF {sub 6}/Ar mixtures. The …
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF {sub 6}/Ar mixtures. The …
Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L Lallement, A Rhallabi, C Cardinaud… - Plasma Sources …, 2009 - ui.adsabs.harvard.edu
A global model has been developed for low-pressure (3-20 mTorr), radio-frequency
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF 6/Ar mixtures. The …
[引用][C] Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L Lallement, A Rhallabi, C Cardinaud… - … Sources Science and …, 2009 - cir.nii.ac.jp
Global model and diagnostic of a low-pressure SF<sub>6</sub>/Ar inductively coupled plasma
| CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ …
| CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ …
Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L Lallement, A Rhallabi, C Cardinaud… - … Sources Science and …, 2009 - hal.science
A global model has been developed for low-pressure (3-20m Torr), radio-frequency
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF6/Ar mixtures. The model …
(rf)(13.56 MHz) inductively coupled plasmas (ICPs), produced in SF6/Ar mixtures. The model …
[引用][C] Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
L LALLEMENT, A RHALLABI… - … sources science & …, 2009 - pascal-francis.inist.fr
Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma CNRS
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …