Investigations on beam membrane and dielectric materials using Ashby's methodology and their impact on the performance of a MEMS capacitive switch
The micro-electro-mechanical-system switch performance significantly depends on
materials used for the design of different components. The two most important elements of …
materials used for the design of different components. The two most important elements of …
Investigations on beam membrane and dielectric materials using Ashby's methodology and their impact on the performance of a MEMS capacitive switch
Kurmendra, R Kumar - Microsystem Technologies, 2021 - dl.acm.org
The micro-electro-mechanical-system switch performance significantly depends on
materials used for the design of different components. The two most important elements of …
materials used for the design of different components. The two most important elements of …