Undulation of sub-100nm porous dielectric structures: A mechanical analysis
T Chevolleau, O Joubert, S Maitrejean… - Applied Physics …, 2007 - pubs.aip.org
In microelectronics technologies, patterning of sub-100 nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
Undulation of sub-100nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - pubs.aip.org
In microelectronics technologies, patterning of sub-100 nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - ui.adsabs.harvard.edu
In microelectronics technologies, patterning of sub-100nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
[引用][C] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - hal.univ-grenoble-alpes.fr
Undulation of sub-100 nm porous dielectric structures: A mechanical analysis - Université
Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter Portail …
Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter Portail …
[PDF][PDF] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - APPLIED PHYSICS …, 2007 - researchgate.net
In microelectronics technologies, patterning of sub-100 nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
[引用][C] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - cnrs.hal.science
Undulation of sub-100 nm porous dielectric structures: A mechanical analysis - CNRS - Centre
national de la recherche scientifique Accéder directement au contenu Documentation FR …
national de la recherche scientifique Accéder directement au contenu Documentation FR …
[PDF][PDF] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - hal.science
In microelectronics technologies, patterning of sub-100 nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
[引用][C] Undulation of sub-100nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert, S Maitrejean… - Applied Physics …, 2007 - cir.nii.ac.jp
[PDF][PDF] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - APPLIED PHYSICS …, 2007 - hal.science
In microelectronics technologies, patterning of sub-100 nm width ridges capped with a
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
titanium nitride mask can lead to undulations of the ridges detrimental to performances. This …
[引用][C] Undulation of sub-100 nm porous dielectric structures: A mechanical analysis
M Darnon, T Chevolleau, O Joubert… - Applied Physics …, 2007 - hal.univ-grenoble-alpes.fr
Undulation of sub-100 nm porous dielectric structures: A mechanical analysis - Université
Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter Portail …
Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter Portail …