A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

MC Wang, JW Jiao, PL Yan, BW Mi… - … of Micromechanics and …, 2014 - iopscience.iop.org
This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …
被引用次数：8 相关文章

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

MC Wang, JW Jiao, PL Yan, BW Mi… - … of Micromechanics and …, 2014 - ui.adsabs.harvard.edu
This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

MC Wang, JW Jiao, PL Yan, BW Mi… - Journal of Micromechanics …, 2014 - inis.iaea.org
[en] This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

MC Wang, JW Jiao, PL Yan, BW Mi, S Qin - Journal of Micromechanics and …, 2014 - osti.gov
This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …

[引用][C] A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

MC WANG, JW JIAO, PL YAN… - … of micromechanics and …, 2014 - pascal-francis.inist.fr
A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced
sensitive springs CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic …