Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias

Z Chen, J Blakeney, M Carruth, PLG Ventzek… - Journal of Vacuum …, 2022 - pubs.aip.org
Pulsed plasmas have emerged as promising candidates as a means for precise control of
ion energy/angle dependent surface processes and surface chemistry during the plasma …
被引用次数：7 相关文章

Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias

Z Chen, J Blakeney, M Carruth… - Journal of Vacuum …, 2022 - ui.adsabs.harvard.edu
Pulsed plasmas have emerged as promising candidates as a means for precise control of
ion energy/angle dependent surface processes and surface chemistry during the plasma …

Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias

Z Chen, J Blakeney, M Carruth, PLG Ventzek… - Journal of Vacuum …, 2022 - pubs.aip.org
Pulsed plasmas have emerged as promising candidates as a means for precise control of
ion energy/angle dependent surface processes and surface chemistry during the plasma …

Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias

Z Chen, J Blakeney, M Carruth, PLG Ventzek… - Journal of Vacuum …, 2022 - cir.nii.ac.jp
抄録< jats: p> Pulsed plasmas have emerged as promising candidates as a means for
precise control of ion energy/angle dependent surface processes and surface chemistry …