Method for fabrication of a semiconductor device and structure

Z Or-Bach, DC Sekar, B Cronquist, I Beinglass… - US Patent …, 2011 - Google Patents
2020-10-20 Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC.
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
被引用次数：102 相关文章

Method for fabrication of a semiconductor device and structure

Z Or-bach, DC Sekar, B Cronquist… - US Patent …, 2011 - freepatentsonline.com
A method of manufacturing a semiconductor wafer, the method including: providing a base
wafer including a semiconductor substrate, metal layers and first alignment marks; …