Performance optimization of nanometer-thin indium-tin oxide transistors by two-step air annealing

Q Gao, D Lin, S Xu, Y Chen, J Li, T Cao, S Chen… - Physica B: Condensed …, 2023 - Elsevier
In this study, the influence of air annealing on nanometer-thin indium tin oxide (ITO)
transistors was investigated. Compared with unannealed devices, the field-effect mobility …
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Performance optimization of nanometer-thin indium-tin oxide transistors by two-step air annealing

Q Gao, D Lin, S Xu, Y Chen, J Li… - Physica B …, 2023 - ui.adsabs.harvard.edu
In this study, the influence of air annealing on nanometer-thin indium tin oxide (ITO)
transistors was investigated. Compared with unannealed devices, the field-effect mobility …