Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkel - Review of scientific instruments, 2005 - pubs.aip.org
Ellipsometry is a versatile optical technique for the investigation of thin films 0.1–300 nm.
Film thickness and refractive index can be obtained rapidly and with high precision …

[PDF][PDF] Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkela - REVIEW OF SCIENTIFIC INSTRUMENTS, 2005 - juser.fz-juelich.de
Ellipsometry is a versatile optical technique for the investigation of thin films 0.1–300 nm.
Film thickness and refractive index can be obtained rapidly and with high precision …

[PDF][PDF] Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkela - REVIEW OF SCIENTIFIC INSTRUMENTS, 2005 - scholar.archive.org
Ellipsometry is a versatile optical technique for the investigation of thin films 0.1–300 nm.
Film thickness and refractive index can be obtained rapidly and with high precision …

[PDF][PDF] Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkela - REVIEW OF SCIENTIFIC INSTRUMENTS, 2005 - core.ac.uk
Ellipsometry is a versatile optical technique for the investigation of thin films 0.1–300 nm.
Film thickness and refractive index can be obtained rapidly and with high precision …

Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - aip.scitation.org
Ellipsometric microscopy is a technique that combines the merits of ellipsometry and light
microscopy, ie, it allows noninvasive, label-free measurements of thin film thickness and …

[引用][C] Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - cir.nii.ac.jp

Quantitative ellipsometric microscopy at the silicon–air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - pubs.aip.org
Ellipsometric microscopy is a technique that combines the merits of ellipsometry and light
microscopy, ie, it allows noninvasive, label-free measurements of thin film thickness and …

Quantitative ellipsometric microscopy at the silicon-air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - inis.iaea.org
[en] Ellipsometric microscopy is a technique that combines the merits of ellipsometry and
light microscopy, ie, it allows noninvasive, label-free measurements of thin film thickness …

Quantitative ellipsometric microscopy at the silicon-air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - osti.gov
Ellipsometric microscopy is a technique that combines the merits of ellipsometry and light
microscopy, ie, it allows noninvasive, label-free measurements of thin film thickness and …

Quantitative ellipsometric microscopy at the silicon-air interface

F Linke, R Merkel - Review of Scientific Instruments, 2005 - ui.adsabs.harvard.edu
Ellipsometric microscopy is a technique that combines the merits of ellipsometry and light
microscopy, ie, it allows noninvasive, label-free measurements of thin film thickness and …