In-situ calibration of the objective lens of an angle-resolved scatterometer for nanostructure metrology
Due to the advantages of being non-contact, non-destructive, highly efficient, and low in
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
In-situ calibration of the objective lens of an angle-resolved scatterometer for nanostructure metrology
J Zhang, J Liu, J Zhu, H Jiang, S Liu - Applied Optics, 2023 - ui.adsabs.harvard.edu
Due to the advantages of being non-contact, non-destructive, highly efficient, and low in
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
In-situ calibration of the objective lens of an angle-resolved scatterometer for nanostructure metrology
J Zhang, J Liu, J Zhu, H Jiang, S Liu - Applied optics, 2023 - pubmed.ncbi.nlm.nih.gov
Due to the advantages of being non-contact, non-destructive, highly efficient, and low in
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
In-situ calibration of the objective lens of an angle-resolved scatterometer for nanostructure metrology.
J Zhang, J Liu, J Zhu, H Jiang, S Liu - Applied Optics, 2023 - europepmc.org
Due to the advantages of being non-contact, non-destructive, highly efficient, and low in
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …
cost, scatterometry has emerged as a powerful technique for nanostructure metrology. In this …