Design and fabrication of a SiN-Si dual-layer optical phased array chip

P Wang, G Luo, Y Xu, Y Li, Y Su, J Ma, R Wang… - photonics …, 2020 - opg.optica.org
A SiN-Si dual-layer optical phased array (OPA) chip is designed and fabricated. It combines
the low loss of SiN with the excellent modulation performance of Si, which improves the …

Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

W Pengfei, L Guangzhen, Y Hongyan… - 2019 Asia …, 2019 - ieeexplore.ieee.org
Design and Fabrication of SiN-Si Dual-layer Optical Phased Array Chip Page 1 Design and
Fabrication of SiN-Si Dual-layer Optical Phased Array Chip Wang Pengfei, Luo Guangzhen …

[PDF][PDF] Design and fabrication of a SiN-Si dual-layer optical phased array chip

P WANG, G LUO, Y XU, Y LI, Y SU, J MA, R WANG… - researching.cn
With the development of autonomous driving, three-dimensional imaging, remote sensing,
and mapping, light detection and ranging (LiDAR) has received great attention. Although …

Design and Fabrication of SiN-Si Dual-layer Optical Phased Array Chip

W Pengfei, L Guangzhen, Y Hongyan… - Asia Communications …, 2019 - opg.optica.org
Design and Fabrication of SiN-Si Dual-layer Optical Phased Array Chip Page 1 M4B.6.pdf Asia
Communications and Photonics Conference (ACP) © OSA 2019 Design and Fabrication of …