Kinetic Monte Carlo simulation for semiconductor processing: A review

I Martin-Bragado, R Borges, JP Balbuena… - Progress in Materials …, 2018 - Elsevier
Abstract The Kinetic Monte Carlo (KMC) algorithm is a particularly apt technique to simulate
the complex processing of semiconductor devices. In this review, some of the main …
被引用次数：61 相关文章

Kinetic Monte Carlo simulation for semiconductor processing: A review

I Martín Bragado, R Borges, JP Balbuena, M Jaraiz - 2018 - rua.ua.es
The Kinetic Monte Carlo (KMC) algorithm is a particularly apt technique to simulate the
complex processing of semiconductor devices. In this review, some of the main processes …

[引用][C] Kinetic Monte Carlo simulation for semiconductor processing: A review

I Martin-Bragado, R Borges, JP Balbuena… - Progress in Materials …, 2018 - cir.nii.ac.jp
Kinetic Monte Carlo simulation for semiconductor processing: A review | CiNii Research
CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …
[PDF] academia.edu

[PDF][PDF] Kinetic Monte Carlo simulation for semiconductor processing: a review

I Martin-Bragado, R Borges, J Pablo-Balbuena… - 2017 - academia.edu
Abstract The Kinetic Monte Carlo (KMC) algorithm is a particularly apt technique to simulate
the complex processing of semiconductor devices. In this review, some of the main …
[PDF] researchgate.net

[PDF][PDF] Kinetic Monte Carlo simulation for semiconductor processing: a review

I Martin-Bragado, R Borges, J Pablo-Balbuena… - 2017 - researchgate.net
Abstract The Kinetic Monte Carlo (KMC) algorithm is a particularly apt technique to simulate
the complex processing of semiconductor devices. In this review, some of the main …